Nano Materials LPCVD

Tystar Corporation has been working with universities and national labs to develop recipes for nano materials CVD for the past 30 years. A variety of nano materials can be produced using Tystar furnaces or non-thermal reactors either either under LPCVD or APCVD conditions.

• CLICK HERE FOR THE DETAILS OF NANO WIRES CVD.
• CLICK HERE FOR THE DETAILS OF NANOTUBES CVD.
• CLICK HERE FOR THE DETAILS OF GRAPHENE CVD.

For the details of other nano materials CVD, please contact 7050 Lampson Avenue Garden Grove, CA 92841 | Tel: (310) 781-9219 or write to sales@tystar.com

Atmospheric Processes

• Silicon Carbide Devices
• Silicon Dioxide Resonators
• Wet Oxidation
• Dry Oxidation with TLC Bubbler Cleaning Option
• Thick Thermal Oxides
• Diffusion of Solid Source Dopants
• POCL₃ or BBR₃ Liquid Source Dopant Diffusion
• Anneal
• Nano Materials LPCVD