Tystar system layouts can be configured specifically to fit into a customer's clean room floor plan.
TYTAN reactor systems can accept all wafer sizes from chips to 2" - 8" wafers and still maintain excellent uniformity by just changing the wafer boat. No equipment changes are necessary.
Outstanding process control guarantees excellent uniformities and minimal particle generation.
A patented isothermal design reduces gas and electricity usage. Proprietary exhaust systems prevent hazing on wafers.
Tystar offers top-rated systems and lifetime technical and process support at an affordable price. Get a quote for more details.
With over 1600 systems installed worldwide, Tystar serves prestigious universities, research labs, and tech companies around the world.