Since solar cells are semiconductor devices, the solar manufacturing processes is not much different form the semiconductor device fabrication process. A new development in the industry is that commercial solar cell manufacturers today use poly-crystalline silicon for manufacturing solar cells. Both our thermal reactors and PECVD reactors are suitable for polysilicon solar cells. On another line of development, thin film solar cells are rapidly gaining momentum and are expected to replace much of the single crystalline silicon solar cell market. Tystar PECVD cluster systems are suitable for the production of thin film solar cells.