氮化硅谐振腔


TYTAN 氮化硅低压化学气相沉积系统用于制备高品质因子氮化硅谐振腔的氮化硅薄膜。已知使用TYTAN 氮化硅系统制备的氮化硅谐振腔品质因子可以达到几百万。TYTAN 氮化硅低压化学气相沉积系统能够制备出优质无氢键几微米后的氮化硅。Tystar专有设计和工程优势使得设备能够连续运行几周而不会出现停机。TYTATN 系统以其自身的稳健性和工艺稳定性而著称。


References:
High-quality silicon on silicon nitride integrated optical platform with an octave-spanning adiabatic interlayer coupler, Amir H. Hosseinnia et al., Nov 2015, Vol. 23, No. 23, OPTICS EXPRESS 30298
Vertical integration of high-Q silicon nitride microresonators into silicon-on-insulator platform, Qing Li et al., July 2013, Vol. 21, No. 15, OPTICS EXPRESS 18244




低压化学气相沉积工艺