Silicon Nitride Resonators

TYTAN nitride LPCVD systems have been used to prepare nitride films needed to fabricate high-Q nitride resonators. Q values of a few million have been obtained using a TYTAN nitride system. TYTAN nitride LPCVD tubes are proven for the capability of producing prime-quality nitride layers free of hydrogen bonds up to a few um in thickness. The proprietary design and engineering unique to Tystar systems make it possible to run the tool for several weeks without an interruption. TYTAN systems are reputable for their robustness and process stability.

References:
High-quality silicon on silicon nitride integrated optical platform with an octave-spanning adiabatic interlayer coupler, Amir H. Hosseinnia et al., Nov 2015, Vol. 23, No. 23, OPTICS EXPRESS 30298
Vertical integration of high-Q silicon nitride microresonators into silicon-on-insulator platform, Qing Li et al., July 2013, Vol. 21, No. 15, OPTICS EXPRESS 18244

LPCVD Processes

• Silicon Carbide Devices
• Silicon Nitride Resonators
• Doped Silicon by LPCVD
• POLYSILICON LPCVD WITH SILANE (SiH₄)
• POLYSILICON LPCVD WITH DISILANE (Si₂H₆)
• LTO, DOPED LTO, BPSG, BSG, AND PSG LPCVD
• HTO LPCVD
• TEOS LPCVD
• Silicon Nitride LPCVD
• Low-Stress Silicon Nitride LPCVD
• Stochiometric Silicon Nitride LPCVD
• Silicon Oxynitride (SiN_xO_y) LPCVD
• Silicon Germanium (Si-Ge) LPCVD
• SIPOS (Semi-Insulating Polycrystalline Silicon)
• Polycrystalline Silicon Carbide
• Epitaxial Silicon
• Nano Materials LPCVD