GAS CONTROL SYSTEM
Tystar's gas control equipment provides precise control and mixing of industrial process gases used in the semiconductor manufacturing industry. The gas panels use compact, modular designs and are fabricated from 316 stainless steel with orbitally-welded joints and connections. They are leak tested to 10-8 cm3/s with helium. The MFS 460 Electronic Gas Controller provides safety interlocks and other critical gas control features.
MFS-460 Electronic Gas Controller
The Tystar MFS 460 Electronic Gas Controller directs the process gas flows of up to six individual mass flow controllers. In either manual or automatic mode, the MFS-460 monitors gas flows, provides flow error bands, and displays set points and actual gas flows. For low-pressure CVD applications, the unit provides reactor pressure readout and closed-loop pressure control. The MFS 460 also stores gas interlocks, gas ratio controls and error bands in an EPROM, guaranteeing safe handling of all process gases. It interfaces (via an RS 232 serial communication data link) with the master controller, such as the Tystar FCS 10. The MFS 460 Electronic Gas Controller provides safety interlocks and other critical gas control features.